1. bookVolume 21 (2021): Issue 3 (June 2021)
Journal Details
License
Format
Journal
First Published
07 Mar 2008
Publication timeframe
6 times per year
Languages
English
access type Open Access

3D Printed Pressure Sensor Based on Surface Acoustic Wave Resonator

Published Online: 24 Jun 2021
Page range: 76 - 81
Received: 30 Mar 2021
Accepted: 31 May 2021
Journal Details
License
Format
Journal
First Published
07 Mar 2008
Publication timeframe
6 times per year
Languages
English
Abstract

This paper reports a 3-dimentional (3D) pressure sensor based on surface acoustic wave (SAW) resonators. The SAW resonators were designed and fabricated on 128°Y-X LiNbO3 substrate using the MEMS technology. The pressure sensing structure was 3D-printed using polyactic acid plastic, and two SAW resonators were integrated in the 3D-printed chamber structure for both temperature and pressure sensing. The SAW-based gas pressure sensors demonstrate a sensitivity of 589 ppm/MPa at the pressure range of 100-600 kPa and temperature of 40 °C.

Keywords

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