<abstract xml:lang="en" xmlns="http://www.w3.org/1999/xhtml"><p>Development of the optoelectronic system for non-invasive monitoring of diamond/DLC (Diamond-Like-Carbon) thin films growth during μPA ECR CVD (Microwave Plasma Assisted Electron Cyclotron Resonance Chemical Vapour Deposition) process is described. The system uses multi-point Optical Emission Spectroscopy (OES) and long-working-distance Raman spectroscopy. Dissociation of H<sub>2</sub> molecules, excitation and ionization of hydrogen atoms as well as spatial distribution of the molecules are subjects of the OES investigation. The most significant parameters of the deposited film like molecular composition of the film can be investigated by means of Raman spectroscopy. Results of optoelectronic investigation will enable improvement of CVD process parameters and synthesized DLC films quality.</p></abstract>

Development of the optoelectronic system for non-invasive monitoring of diamond/DLC (Diamond-Like-Carbon) thin films growth during μPA ECR CVD (Microwave Plasma Assisted Electron Cyclotron Resonance Chemical Vapour Deposition) process is described. The system uses multi-point Optical Emission Spectroscopy (OES) and long-working-distance Raman spectroscopy. Dissociation of H2 molecules, excitation and ionization of hydrogen atoms as well as spatial distribution of the molecules are subjects of the OES investigation. The most significant parameters of the deposited film like molecular composition of the film can be investigated by means of Raman spectroscopy. Results of optoelectronic investigation will enable improvement of CVD process parameters and synthesized DLC films quality.

Optoelectronic system for investigation of CVD diamond/DLC layers growth

Faculty of Electronics, Telecommunication and Informatics, Department of Optoelectronics and Electronic Systems, Gdansk University of Technology, Gdansk, Poland

Advances in Materials Science

{"article-title":"Optoelectronic system for investigation of CVD diamond/DLC layers growth"}

Development of the optoelectronic system for non-invasive monitoring of diamond/DLC (Diamond-Like-Carbon) thin films growth during μPA ECR CVD (Microwave...

Optoelectronic system for investigation of CVD diamond/DLC layers growth

Data publikacji: 13 sty 2010

Zakres stron: 47 - 53

DOI: https://doi.org/10.2478/v10077-009-0015-z

Słowa kluczowe
CVD, diamond/diamond-like-carbon layers, optical emission spectroscopy, Raman spectroscopy

This content is open access.

Optoelectronic system for investigation of CVD diamond/DLC layers growth

Data publikacji: 13 sty 2010

Zakres stron: 47 - 53

DOI: https://doi.org/10.2478/v10077-009-0015-z

Słowa kluczoweCVD, diamond/diamond-like-carbon layers, optical emission spectroscopy, Raman spectroscopy

This content is open access.

Słowa kluczowe
CVD, diamond/diamond-like-carbon layers, optical emission spectroscopy, Raman spectroscopy